sentronics metrology GmbH was founded in 2006. It is located in Mannheim, Germany, close to Frankfurt Airport. The company’s technology is based on optical interferometry, which is used to measure any kind of nanometer or micrometer topology in semiconductor manufacturing processes. Applications are multilayer and film thickness, wafer surface roughness and flatness, geometric dimensioning of wafer surface irregularities and 3D micro structures. sentronics has developed multiple optical sensors that can be combined and integrated into one ‘Wafer Metrology Center’ called SemDex to run all of these applications in one metrology machine either semi-automated or fully automated. These Wafer Metrology Centers are part of the wafer manufacturing process for all IC product types, and established worldwide in foundries and fabs for memory and logic, analogue, and MEMS devices and IC packaging.